Diamond‐Like Carbon Thin Films Grown in Pulsed‐DC Plasmas

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https://hal.archives-ouvertes.fr/hal-02017515
Contributor : Miguel Rubio-Roy <>
Submitted on : Wednesday, February 13, 2019 - 11:13:43 AM
Last modification on : Wednesday, February 13, 2019 - 11:13:43 AM

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  • HAL Id : hal-02017515, version 1

Citation

Enric Bertran, Miguel Rubio-Roy, Carles Corbella, José Luis Andujar. Diamond‐Like Carbon Thin Films Grown in Pulsed‐DC Plasmas. Industrial plasma technology: Applications from environmental to energy technologies, 2010. ⟨hal-02017515⟩

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