Fluorinated DLC deposited by pulsed-DC plasma for antisticking surface applications

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https://hal.archives-ouvertes.fr/hal-02017473
Contributor : Miguel Rubio-Roy <>
Submitted on : Wednesday, February 13, 2019 - 11:02:56 AM
Last modification on : Wednesday, February 13, 2019 - 11:02:56 AM

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  • HAL Id : hal-02017473, version 1

Citation

Miguel Rubio-Roy, E. Bertran, E. Pascual, M. Polo, J.L. Andújar. Fluorinated DLC deposited by pulsed-DC plasma for antisticking surface applications. Diamond and Related Materials, Elsevier, 2008, 17 (7-10), pp.1728-1732. ⟨hal-02017473⟩

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