Diamond like carbon films deposited from graphite target by asymmetric bipolar pulsed-DC magnetron sputtering

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https://hal.archives-ouvertes.fr/hal-02017443
Contributor : Miguel Rubio-Roy <>
Submitted on : Wednesday, February 13, 2019 - 10:56:25 AM
Last modification on : Wednesday, February 13, 2019 - 10:59:58 AM

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  • HAL Id : hal-02017443, version 1

Citation

Miguel Rubio-Roy, C. Corbella, J. Garcia-Céspedes, M. Polo, E. Pascual, et al.. Diamond like carbon films deposited from graphite target by asymmetric bipolar pulsed-DC magnetron sputtering. Diamond and Related Materials, Elsevier, 2007, 16 (4-7), pp.1286-1290. ⟨hal-02017443⟩

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