Direct sub-micron microstructuring on cylinder using TiO2 sol-gel process and radial phase mask based lithography

L. Berthod (1) , F. Vocanson (1) , M. Langlet (2) , C. Veillas (1) , S. Reynaud (3) , I. Verrier (1) , J. Laukkanen (4) , O. Parriaux (1) , Y. Jourlin (1)

1 LHC - Laboratoire Hubert Curien
2 LMGP - Laboratoire des matériaux et du génie physique
3 LKB (Lhomond) - Laboratoire Kastler Brossel
4 University of Eastern Finland

Domaines: Matériaux

L. Berthod, F. Vocanson, M. Langlet, C. Veillas, S. Reynaud, et al.. Direct sub-micron microstructuring on cylinder using TiO2 sol-gel process and radial phase mask based lithography. SPIE Photonics Europe, Apr 2016, Bruxelles, Belgium. ⟨hal-02016941⟩