Planar glass integrated optical structure based on prism decoupling for sensing applications

Celia Sanchez-Perez (1) , Elise Ghibaudo (1, 2) , Jean-Emmanuel Broquin (2) , Augusto Garcia-Valenzuela (1) , A. Esparza-Garcia (1) , A. Camacho-Lopez (1)

1 CCADET-UNAM - Laboratorio de Óptica No Lineal, Centro de Ciencias Aplicadas y Desarrollo Tecnológico [México]
2 IMEP - Institut de Microélectronique, Electromagnétisme et Photonique

We present the design of an innovating integrated planar structure adapted for intensity or phase measurements. It is based on the evanescent prism decoupling of the optical signal from a waveguide used as the sensing element. The device is formed by successive thin film sputtering deposition. A TiO2 crystalline layer forms the gas sensing element from which light is coupled out by a planar high refractive index prism. We experimentally validate the structure.

Mots clés: Prism coupling; Planar waveguide; Refractive index; Thin films

Domaines: Optique / photonique

Celia Sanchez-Perez, Elise Ghibaudo, Jean-Emmanuel Broquin, Augusto Garcia-Valenzuela, A. Esparza-Garcia, et al.. Planar glass integrated optical structure based on prism decoupling for sensing applications. SPIE OPTO, Mar 2005, San Jose, United States. pp.112-119, ⟨10.1117/12.590590⟩. ⟨hal-02008782⟩