Design and optimization of a MEMS quartz mass sensor array for biosensing

Ahmad Anwar Zainuddin (1) , Anis Nurashikin Nordin (1) , Aliza Aini Md Ralib (1) , Rosminazuin Ab Rahim (1) , Sheroz Khan (1) , Cyril Guines (2) , Matthieu Chatras (3) , Arnaud Pothier (3)

1 International Islamic University Malaysia [Kuala Lumpur]
2 XLIM - XLIM
3 XLIM-RFEI - RF-ELITE : RF-Electronique Imprimée pour les Télécommunications et l'Energie

Domaines: Sciences de l'ingénieur [physics]

Ahmad Anwar Zainuddin, Anis Nurashikin Nordin, Aliza Aini Md Ralib, Rosminazuin Ab Rahim, Sheroz Khan, et al.. Design and optimization of a MEMS quartz mass sensor array for biosensing. 2017 IEEE 4th International Conference on Smart Instrumentation, Measurement and Application (ICSIMA), Nov 2017, Putrajaya, Malaysia. pp.1-5. ⟨hal-02006927⟩