Quasi-static capacitance measurements in pseudo-MOSFET configuration for Dit extraction in SOI wafers

L. Pirro (1) , I. Ionica (1) , X. Mescot (1) , S. Cristoloveanu (1) , G. Ghibaudo (1) , L. Faraone (2)

1 IMEP-LAHC - Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation
2 EECE - School of Electrical, Electronic and Computer Engineering [Crawley]

We investigate for the first time the quasi-static capacitance technique in pseudo-MOSFET configuration for the characterization of bare SOI wafers. We show the difference between the measurements performed with slow and fast ramp speed and compare them with split-CV characteristics. We discuss the impact of experimental parameters such as ramp speed, probe pressure and number of probes. Finally, we present an experimental procedure, based on an original physical model, to extract the interface trap density.

Mots clés: interface trap density; capacitance measurement; pseudo-MOSFET; quasi-static; SOI

Domaines: Micro et nanotechnologies/Microélectronique

L. Pirro, I. Ionica, X. Mescot, S. Cristoloveanu, G. Ghibaudo, et al.. Quasi-static capacitance measurements in pseudo-MOSFET configuration for Dit extraction in SOI wafers. 2015 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), Jan 2015, Bologna, Italy. pp.249-252, ⟨10.1109/ULIS.2015.7063820⟩. ⟨hal-02004087⟩