Fabrication of SnO₂ Flexible Sensor by Inkjet Printing Technology

Omar Kassem (1, 2, 3, 4, 5, 6) , Mohamed Saadaoui (1, 2, 3) , Mathilde Rieu (4, 5, 6) , Jean-Paul Viricelle (4, 5, 6)

1 LIMOS - Laboratoire d'Informatique, de Modélisation et d'Optimisation des Systèmes
2 CMP-ENSMSE - Centre Microélectronique de Provence - Site Georges Charpak (CMP-GC)
3 FEL-ENSMSE - Département d’Électronique Flexible
4 LGF-ENSMSE - Laboratoire Georges Friedel
5 SPIN-ENSMSE - Centre Sciences des Processus Industriels et Naturels
6 PTSI-ENSMSE - Département Procédés de Transformations des Solides et Instrumentation

In this work, a flexible tin oxide (SnO₂) gas sensor was successfully fabricated by inkjet printing technology. This thin film deposition technique requires the formulation of stable suspensions with specific fluidic properties. Aqueous Sol-gel method was applied to synthesize a stable sol based on tin oxide, then transformed into ink with the appropriate viscosity and surface tension to be printed using a drop-on-demand piezoelectric inkjet printer. Thermal analyses of synthetized sol show that a crystallized structure of SnO₂ could be obtained at 350 °C, which is lower than crystallization temperatures of SnO₂ previously reported in the literature, and entirely consistent with our plastic substrate. The printed thin-film was then sintered at 350 °C on polyimide foil (Upilex-50S) and characterized as sensor.

Mots clés: flexible gas sensor; SnO₂ ink preparation; sol-gel process; inkjet printing

Domaines: Génie des procédés; Matériaux

Omar Kassem, Mohamed Saadaoui, Mathilde Rieu, Jean-Paul Viricelle. Fabrication of SnO₂ Flexible Sensor by Inkjet Printing Technology. EUROSENSORS 2018, Materials Center Leoben Forschungs GmbH; University of Graz (Uni Graz); Graz University of Technology (TU Graz), Sep 2018, Graz, Austria. pp.907, ⟨10.3390/proceedings2130907⟩. ⟨hal-01997589⟩