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Near-field microscopy: Is there an alternative to micro and nano resonating cantilevers?

Abstract : Most of commercial Atomic Force Microscope (AFM) oscillating probes use micrometric cantilevers that can make measurement with piconewton force resolution under vacuum. However, the flexure vibration cantilevers suffer from a degradation of both resonance frequency and quality factor when operating in liquids. Moreover, the additional laser set-up for amplitude detection also limits the integration and miniaturization of the resonator structure. In order to overcome these difficulties, we propose to replace cantilevers by bulk mode, in-plane vibrating MEMS resonators with integrated transduction methods.
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https://hal.laas.fr/hal-01962163
Contributor : Bernard Legrand <>
Submitted on : Thursday, December 20, 2018 - 2:14:01 PM
Last modification on : Tuesday, June 2, 2020 - 7:36:04 AM

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Lionel Buchaillot, Estelle Mairiaux, Benjamin Walter, Zhuang Xiong, Marc Faucher, et al.. Near-field microscopy: Is there an alternative to micro and nano resonating cantilevers?. IEEE International Frequency Control Symposium, May 2014, Taipei, Taiwan. ⟨10.1109/FCS.2014.6859928⟩. ⟨hal-01962163⟩

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