Cost effective laser structuration of optical waveguides on thin glass interposer

Jean-Marc Boucaud (1) , Folly-Eli Ayi-Yovo (1) , Quentin Hivin (2) , Matthieu Berthomé (2) , Cédric Durand (1) , Frédéric Gianesello (1) , D. Bucci (3) , Guillaume Ducournau (2, 4) , J.F. Robillard (2, 5) , Jean-Emmanuel Broquin (3) , Emmanuel Dubois (2, 5)

1 ST-CROLLES - STMicroelectronics [Crolles]
2 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
3 IMEP-LAHC - Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation
4 PHOTONIQUE THZ - IEMN - Photonique THz - IEMN
5 MICROELEC SI - IEMN - Microélectronique Silicium - IEMN

In order to enhance electro-optical system-in-package capabilities for silicon photonics, a cost effective fabrication process for optical waveguides integration on thin glass substrate interposer is demonstrated. Firstly, a femtosecond laser ablation coupled with a hydrofluoric acid etching is developed to create micro grooves at the glass surface. Secondly, a dry film lamination followed by chemical mechanical planarization is achieved to define surface optical waveguides by filling the micro channels. Physical characterizations of the fabricated waveguides are performed using optical and scanning electron microscopy. Finally, optical mode profile and loss characterizations confirm the optical functionality of waveguides which prove to be multimodal at 1550 nm.

Mots clés: Femtosecond laser; polymer optical waveguide; thin glass interposer

Domaines: Optique / photonique; Electronique; Electromagnétisme

Jean-Marc Boucaud, Folly-Eli Ayi-Yovo, Quentin Hivin, Matthieu Berthomé, Cédric Durand, et al.. Cost effective laser structuration of optical waveguides on thin glass interposer. Journal of Lightwave Technology, 2017, 35 (20), pp.4445-4450. ⟨10.1109/JLT.2017.2732461⟩. ⟨hal-01961118⟩