Assessing the Composition of Wide Bandgap Compound Semiconductors by Atom Probe Tomography: A Metrological Problem

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https://hal.archives-ouvertes.fr/hal-01954232
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Submitted on : Thursday, December 13, 2018 - 3:19:28 PM
Last modification on : Wednesday, July 3, 2019 - 11:26:36 AM

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L. Rigutti, L. Mancini, E. Di Russo, I. Blum, F. Moyon, et al.. Assessing the Composition of Wide Bandgap Compound Semiconductors by Atom Probe Tomography: A Metrological Problem. Microscopy and Microanalysis, 2016, 22 (S3), pp.650-651. ⟨10.1017/S1431927616004104⟩. ⟨hal-01954232⟩

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