Progress in the understanding of Ni silicide formation for advanced MOS structures

Dominique Mangelinck (1) , K. Hoummada (1) , F. Panciera (2) , M. El Kousseifi , I. Blum (1) , M. Descoins (1) , M. Bertoglio (1) , A. Portavoce (1) , Carine Perrin-Pellegrino (1) , Magali Putero (1)

1 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
2 ST-CROLLES - STMicroelectronics [Crolles]

Domaines: Matériaux; Science des matériaux [cond-mat.mtrl-sci]

Dominique Mangelinck, K. Hoummada, F. Panciera, M. El Kousseifi, I. Blum, et al.. Progress in the understanding of Ni silicide formation for advanced MOS structures. physica status solidi (a), 2014, 211 (1), pp.152-165. ⟨10.1002/pssa.201300167⟩. ⟨hal-01951259⟩