Impact of dopant species on the interfacial trap density and mobility in amorphous In-X-Zn-O solution-processed thin-film transistors

Mohammed Benwadih (1) , Jan Chroboczek (2) , Gérard Ghibaudo (2) , Romain Coppard (1) , Dominique Vuillaume (3)

1 LITEN - Laboratoire d'Innovation pour les Technologies des Energies Nouvelles et les nanomatériaux
2 IMEP-LAHC - Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation
3 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520

Alloying of In/Zn oxides with various X atoms stabilizes the IXZO structures but generates electron traps in the compounds, degrading the electron mobility, μ. To assess whether the latter is linked to the oxygen affinity or the ionic radius, of the X element, several IXZO samples are synthesized by the sol-gel process, with a large number (14) of X elements. The IXZOs are characterized by XPS, SIMS, DRX, and UV-spectroscopy and used for fabricating thin film transistors. Channel μ and the interface defect density NST, extracted from the TFT electrical characteristics and low frequency noise, followed an increasing trend and the values of μ and NST are linked by an exponential relation. The highest μ (8.5 cm2V−1s−1) is obtained in In-Ga-Zn-O, and slightly lower value for Sb and Sn-doped IXZOs, with NST ≈ 2 × 1012 eV−1 cm−2, close to that of the In-Zn-O reference TFT. This is explained by a higher electronegativity of Ga, Sb, and Sn than Zn and In, their ionic radius values being close to that of In and Zn. Consequently, Ga, Sb, and Sn induce weaker perturbations of In-O and Zn-O sequences in the sol-gel process, than the X elements having lower electronegativity and different ionic radius. The TFTs with X = Ca, Al, Ni and Cu exhibited the lowest μ and NST > 1013 eV−1cm−2, most likely because of metallic or oxide clusters formation.

Domaines: Micro et nanotechnologies/Microélectronique

Mohammed Benwadih, Jan Chroboczek, Gérard Ghibaudo, Romain Coppard, Dominique Vuillaume. Impact of dopant species on the interfacial trap density and mobility in amorphous In-X-Zn-O solution-processed thin-film transistors. Journal of Applied Physics, 2014, 115 (21), pp.214501. ⟨10.1063/1.4880163⟩. ⟨hal-01947615⟩