AlN/ZnO/LiNbO 3 Packageless Structure as a Low-Profile Sensor for Potential On-Body Applications - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control Année : 2018

AlN/ZnO/LiNbO 3 Packageless Structure as a Low-Profile Sensor for Potential On-Body Applications

Cécile Floer
Sami Hage-Ali
Stefan Mc Murtry
Omar Elmazria

Résumé

Surface acoustic wave (SAW) sensors find their application in a growing number of fields. This interest stems in particular from their passive nature and the possibility of remote interrogation. Still, the sensor package, due to its size, remains an obstacle for some applications. In this regard, packageless solutions are very promising. This paper describes the potential of the AlN/ZnO/LiNbO3 structure for packageless acoustic wave sensors. This structure, based on the waveguided acoustic wave principle, is studied numerically and experimentally. According to the COMSOL simulations, a wave, whose particle displacement is similar to a Rayleigh wave, is confined within the structure when the AlN film is thick enough. This result is confirmed by comprehensive experimental tests, thus proving the potential of this structure for packageless applications, notably temperature sensing. Index Terms-Surface acoustic wave SAW, temperature sensor, waveguiding layer acoustic wave WLAW, packageless, low-profile.
Fichier principal
Vignette du fichier
TUFFC2839262.pdf (1.14 Mo) Télécharger le fichier
Origine : Accord explicite pour ce dépôt
Loading...

Dates et versions

hal-01941686 , version 1 (28-01-2020)

Identifiants

Citer

Cécile Floer, Sami Hage-Ali, Sergei Zhgoon, Mohammed Moutaouekkil, Florian Bartoli, et al.. AlN/ZnO/LiNbO 3 Packageless Structure as a Low-Profile Sensor for Potential On-Body Applications. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2018, 65 (10), pp.1925-1932. ⟨10.1109/TUFFC.2018.2839262⟩. ⟨hal-01941686⟩
143 Consultations
191 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More