Microfabricated sensor platform with through-glass vias for bidirectional 3-omega thermal characterization of solid and liquid samples

Corinna Grosse (1) , Mohamad Abo Ras (1) , Aapo Varpula (2) , Kestutis Grigoras (2) , Daniel May (1, 3) , Bernhard Wunderle (3) , Pierre-Olivier Chapuis (4, 5) , Séverine Gomès (5, 4) , Mika Prunnila (6)

1 Berliner Nanotest und Design GmbH
2 VTT - VTT Technical Research Centre of Finland
3 Chemnitz University of Technology / Technische Universität Chemnitz
4 INSA Lyon - Institut National des Sciences Appliquées de Lyon
5 CETHIL - Centre d'Energétique et de Thermique de Lyon
6 Technical Research Centre of Finland

Domaines: Thermique [physics.class-ph]

Corinna Grosse, Mohamad Abo Ras, Aapo Varpula, Kestutis Grigoras, Daniel May, et al.. Microfabricated sensor platform with through-glass vias for bidirectional 3-omega thermal characterization of solid and liquid samples. Sensors and Actuators A: Physical , 2018, 278, pp.33 - 42. ⟨10.1016/j.sna.2018.05.030⟩. ⟨hal-01932436⟩