Performance of the multiple events position sensitive detector used in the tomographic atom probe

Bernard Deconihout (1) , A. Bostel (1) , M. Bouet , J. M. Sarrau , P. Bas (2) , D. Blavette (1)

1 GPM - Groupe de physique des matériaux
2 LIS - Laboratoire des images et des signaux

The tomographic atom probe (TAP) is the first 3D atom probe based around the use of a parallel position encoding system. This contribution will be focused on the implementation and the study of the TAP position sensitive detector. In the first part, it will be shown why this detector necessarily has to be sensitive to simultaneous events and the detector principle will be described. Then performance and limitations of the TAP will be discussed and related to the detector performance itself. Critical points such as spatial resolution, mass resolution or detection efficiency will be quantified. \textcopyright 1995.

Domaines: Physique [physics]

Bernard Deconihout, A. Bostel, M. Bouet, J. M. Sarrau, P. Bas, et al.. Performance of the multiple events position sensitive detector used in the tomographic atom probe. Applied Surface Science, 1995, 87-88 (C), pp.428--437. ⟨10.1016/0169-4332(94)00534-6⟩. ⟨hal-01928963⟩