A general protocol for the reconstruction of 3D atom probe data

P. Bas , A. Bostel (1) , Bernard Deconihout (1) , D. Blavette (1)

1 GPM - Groupe de physique des matériaux

Data collected with 3D atom probes have to be carefully analysed in order to give reliable composition data precisely positioned in the probed volume. Indeed, the large analysed surfaces of 3D atom probes require the development of reconstruction methods taking into account the tip geometry. When the analysis does not take place in the close vicinity of the tip axis, the analysis direction is no longer perpendicular to the evaporated surface. The influence of this effect on the local magnification and atom positioning must be taken into account. The proposed procedure will be validated by studying the effects of calculations on a long-range-ordered phase. \textcopyright 1995.

Domaines: Physique [physics]

P. Bas, A. Bostel, Bernard Deconihout, D. Blavette. A general protocol for the reconstruction of 3D atom probe data. Applied Surface Science, 1995, 87-88 (C), pp.298--304. ⟨10.1016/0169-4332(94)00561-3⟩. ⟨hal-01928957⟩