Depth analysis of Al/ZrC interfaces using SIMS and x-ray reflectivity

Abstract : The Al/ZrC/Al/W multilayer structure is suitable for waveguide applications in the hard x-ray range in order to confine the wave field in a nanometer-thick layer. Intermixing of Al at the interfaces is a serious problem to achieve the expected performances from an experimentally grown multilayer. In the present study, our aim is to investigate the effect of a capping layer on the ZrC/Al interfaces in an C/Al/ZrC/Al/W waveguide structure. We use time of flight secondary ion mass spectrometry (ToF-SIMS) and soft x-ray reflectivity (SXR) to study the x-ray waveguide structure. Structural parameters of the stack, density, thickness and roughness of the layers, are determined through fitting of SXR data. SIMS results indicate that the Al diffusion towards the top of the stack is responsible of the formation of wide and asymmetric interfaces in the waveguide structure.
Complete list of metadatas

Cited literature [8 references]  Display  Hide  Download

https://hal.sorbonne-universite.fr/hal-01919286
Contributor : Gestionnaire Hal-Su <>
Submitted on : Monday, November 12, 2018 - 12:19:51 PM
Last modification on : Saturday, March 23, 2019 - 1:40:28 AM
Long-term archiving on: Wednesday, February 13, 2019 - 2:17:18 PM

File

Modi et al. - 2018 - Depth ana...
Files produced by the author(s)

Identifiers

Citation

Mohammed Modi, Mangalika Sinha, Aniruddha Bose, Amol Singh, Philippe Jonnard. Depth analysis of Al/ZrC interfaces using SIMS and x-ray reflectivity. Surface and Interface Analysis, Wiley-Blackwell, 2018, 50 (11), pp.1239 - 1242. ⟨10.1002/sia.6443⟩. ⟨hal-01919286⟩

Share

Metrics

Record views

164

Files downloads

111