Multi sub-band Monte Carlo simulation of an ultra-thin double gate MOSFET with 2D electron gas

Jérôme Saint-Martin (1) , A. Bournel (1) , F Monsef (1) , C. Chassat (1) , P. Dollfus (1)

1 IEF - Institut d'électronique fondamentale

A new two-dimensional self-consistent Monte Carlo simulator including multi sub-band transport in 2D electron gas is described and applied to thin-film SOI double gate MOSFETs. This approach takes into account both out of equilibrium transport and quantization effects. Our method allows us to significantly improve microscopic insight into the operation of deep sub-100 nm CMOS devices. We compare and analyse the results obtained with and without quantization effects for a 15 nm long DGMOS transistor.

Domaines: Micro et nanotechnologies/Microélectronique; Electronique

Jérôme Saint-Martin, A. Bournel, F Monsef, C. Chassat, P. Dollfus. Multi sub-band Monte Carlo simulation of an ultra-thin double gate MOSFET with 2D electron gas. Semiconductor Science and Technology, 2006, 21 (4), pp.L29 - L31. ⟨10.1088/0268-1242/21/4/L01⟩. ⟨hal-01909484⟩