Fabrication, characterization and test of acoustic sensors for detection of pollutants in aquatic environments

D. Lapeine (1) , F. Very (1) , D. Laux (1, 2) , J.-Y. Ferrandis (1, 2) , Benoit Charlot (1, 2) , F. Pascal (1, 3) , P. Combette (1, 2) , Alain Giani (1, 2)

1 IES - Institut d’Electronique et des Systèmes
2 M2A - Matériaux, MicroCapteurs et Acoustique
3 M@CSEE - Micro électronique, Composants, Systèmes, Efficacité Energétique

Domaines: Electronique

D. Lapeine, F. Very, D. Laux, J.-Y. Ferrandis, Benoit Charlot, et al.. Fabrication, characterization and test of acoustic sensors for detection of pollutants in aquatic environments. 2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2015, Montpellier, France. ⟨hal-01906213⟩