Natural rubber based thin coating for MEMS encapsulation
Résumé
A new telechelic liquid natural rubber is used to elaborate thin coating (<1 μm). The nature of the crosslinking reaction was elucidated via a combined FTIR spectroscopy/ab initio simulation study. This study allows the optimization of the crosslinking reaction (curing temperature and time) through kinetic studies. The modification of the physical properties (i.e. morphology and mechanical properties) during the crosslinking were followed by atomic force microscopy (AFM). We believe that because of its physical properties as well as its processing conditions, the proposed material is a good candidate for encapsulation MEMS encapsulation.