Impact of CMOS Post Nitridation Annealing on Reliability of 40nm 512kB Embedded Flash Array

Thibault Kempf (1, 2, 3) , Marc Mantelli (3) , François Maugain (3) , Arnaud Regnier (3) , Jean-Michel Portal (2) , Pascal Masson (1) , Jean-Michel Moragues (3) , Marjorie Hesse (3) , V. Della Marca (2) , Julien Franck (3) , Stephan Niel (4)

1 Polytech'Lab - Laboratoire de Polytech Nice-Sophia
2 IM2NP - Institut des Matériaux, de Microélectronique et des Nanosciences de Provence
3 ST-ROUSSET - STMicroelectronics [Rousset]
4 ST-CROLLES - STMicroelectronics [Crolles]

Domaines: Micro et nanotechnologies/Microélectronique

Thibault Kempf, Marc Mantelli, François Maugain, Arnaud Regnier, Jean-Michel Portal, et al.. Impact of CMOS Post Nitridation Annealing on Reliability of 40nm 512kB Embedded Flash Array. 2017 IEEE International Integrated Reliability Workshop (IIRW), Oct 2017, Fallen Leaf Lake, CA, United States. ⟨hal-01900747⟩