Comparison of two experimental methods for the mechanical characterization of thin or thick films from the study of micromachined circular diaphragms

Christophe Malhaire

doi:10.1063/1.4719964

Article Dans Une Revue Review of Scientific Instruments Année : 2012

Comparison of two experimental methods for the mechanical characterization of thin or thick films from the study of micromachined circular diaphragms

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Christophe Malhaire

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PersonId : 172495
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INL - Dispositifs Electroniques

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Micro et nanotechnologies/Microélectronique

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https://hal.science/hal-01893587

Soumis le : jeudi 11 octobre 2018-15:26:29

Dernière modification le : vendredi 24 mars 2023-14:53:08

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hal-01893587 , version 1 (11-10-2018)

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HAL Id : hal-01893587 , version 1
DOI : 10.1063/1.4719964

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Christophe Malhaire. Comparison of two experimental methods for the mechanical characterization of thin or thick films from the study of micromachined circular diaphragms. Review of Scientific Instruments, 2012, 83 (5), ⟨10.1063/1.4719964⟩. ⟨hal-01893587⟩

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Comparison of two experimental methods for the mechanical characterization of thin or thick films from the study of micromachined circular diaphragms

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