The Impact of the Virtual Metrology on a Run-to-Run control for a Chemical Mechanical Planarization process * *This work is part of the European projects "INTEGRATE" and "MAGE", and carried by STMicroelectronics Fab of Rousset

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https://hal.archives-ouvertes.fr/hal-01893101
Contributor : Guillaume Graton <>
Submitted on : Thursday, October 11, 2018 - 10:01:53 AM
Last modification on : Tuesday, May 21, 2019 - 2:22:03 PM

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M. Jebri, M. El Adel, G. Graton, M. Ouladsine, J. Pinaton. The Impact of the Virtual Metrology on a Run-to-Run control for a Chemical Mechanical Planarization process * *This work is part of the European projects "INTEGRATE" and "MAGE", and carried by STMicroelectronics Fab of Rousset. IFAC-PapersOnLine, Elsevier, 2017, 50 (1), pp.6154 - 6159. ⟨10.1016/j.ifacol.2017.08.980⟩. ⟨hal-01893101⟩

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