Run To Run control based on categorical output in semiconductor manufacturing

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Conference papers
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https://hal.archives-ouvertes.fr/hal-01893096
Contributor : Guillaume Graton <>
Submitted on : Thursday, October 11, 2018 - 9:59:47 AM
Last modification on : Saturday, October 13, 2018 - 1:22:26 AM

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M. Adel, M. Jebri, M. El Adel, El Mostafa El Adel, Guillaume Graton, et al.. Run To Run control based on categorical output in semiconductor manufacturing. 2016 5th International Conference on Systems and Control (ICSC), May 2016, Marrakesh, France. ⟨10.1109/ICoSC.2016.7507083⟩. ⟨hal-01893096⟩

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