Virtual metrology based on relevant feature extraction and just-in-time learning approach

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Conference papers
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https://hal.archives-ouvertes.fr/hal-01893092
Contributor : Guillaume Graton <>
Submitted on : Thursday, October 11, 2018 - 9:56:52 AM
Last modification on : Saturday, October 13, 2018 - 1:22:21 AM

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M. Jebri, G. Graton, M. Adel, M. Ouladsine, J. Pinaton. Virtual metrology based on relevant feature extraction and just-in-time learning approach. 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), May 2016, Saratoga Springs, France. ⟨10.1109/ASMC.2016.7491086⟩. ⟨hal-01893092⟩

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