Implementing laser based failure analysis methodologies using test vehicles

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https://hal.archives-ouvertes.fr/hal-01887706
Contributor : Vincent Pouget <>
Submitted on : Thursday, October 4, 2018 - 1:48:28 PM
Last modification on : Friday, October 5, 2018 - 1:16:35 AM

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D. Lewis, V. Pouget, F. Beaudoin, T. Beauchene, G. Haller, et al.. Implementing laser based failure analysis methodologies using test vehicles. 2004 International Conference on Microelectronic Test Structures, Mar 2004, Awaji Yumebutai, Japan. ⟨10.1109/ICMTS.2004.1309482⟩. ⟨hal-01887706⟩

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