Simulation, characterization and implementation of a new SCR-based device with a turn-off capability for EOS-immune ESD power supply clamps in advanced CMOS technology nodes

Jorge Loayza (1, 2) , Nicolas Guitard (2) , Bruno Allard (1) , Luong Viet Phung (1) , Blaise Jacquier (2) , Philippe Galy (2)

1 EE - Ampère, Département Energie Electrique
2 ST-CROLLES - STMicroelectronics [Crolles]

A new SCR-based device for ESD protection is presented through TCAD simulation and experimental results on a standalone configuration and for a power supply ESD clamp strategy. The new device can turn-off even if the voltage power supply is applied at its Anode. We use 3D TCAD simulation for understanding its turn-on and turn-off behavior. At the same time, the flexibility of the EOS test bench allows for standalone and power supply clamp characterizations at chip level at ambient and high temperature.

Domaines: Energie électrique

Jorge Loayza, Nicolas Guitard, Bruno Allard, Luong Viet Phung, Blaise Jacquier, et al.. Simulation, characterization and implementation of a new SCR-based device with a turn-off capability for EOS-immune ESD power supply clamps in advanced CMOS technology nodes. Microelectronics Reliability, 2018, 85, pp.176 - 189. ⟨10.1016/j.microrel.2018.04.013⟩. ⟨hal-01874227⟩