Ultimate limits of differential resonant MEMS sensors based on two coupled linear resonators

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https://hal.archives-ouvertes.fr/hal-01868247
Contributor : Pietro Maris Ferreira <>
Submitted on : Wednesday, September 5, 2018 - 11:38:18 AM
Last modification on : Friday, March 22, 2019 - 1:40:49 AM

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Jérôme Juillard, Pierre Prache, Pietro Maris Ferreira, Nuria Barniol. Ultimate limits of differential resonant MEMS sensors based on two coupled linear resonators. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Institute of Electrical and Electronics Engineers, In press, ⟨10.1109/tuffc.2018.2869415⟩. ⟨hal-01868247⟩

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