S. Silvestri and E. Schena, Micromachined Flow Sensors in Biomedical Applications, vol.3, pp.225-243, 2012.
DOI : 10.3390/mi3020225
URL : http://www.mdpi.com/2072-666X/3/2/225/pdf

N. Chiu, T. Hsiao, and C. Lin, Low power consumption design of micro-machined thermal sensor for portable spirometer, Tamkang J. Sci. Eng, vol.8, issue.3, pp.225-230, 2005.

J. T. Kuo, L. Chang, P. Li, T. Hoang, and E. Meng, A microfluidic platform with integrated flow sensing for focal chemical stimulation of cells and tissue, Sens. Actuators B Chem, vol.152, issue.2, pp.267-276, 2011.

G. Soundararajan, M. Rouhanizadeh, H. Yu, L. Demaio, E. S. Kim et al., MEMS shear stress sensors for microcirculation, Sens. Actuators Phys, vol.118, issue.1, pp.25-32, 2005.
DOI : 10.1016/j.sna.2004.07.005

L. Chang, P. Li, L. Zhao, T. Hoang, and E. Meng, Integrated flow sensing for focal biochemical stimulation, pp.921-926, 2008.

T. K. Hsiai, Micro Sensors: Linking Real-Time Oscillatory Shear Stress with Vascular Inflammatory Responses, Ann. Biomed. Eng, vol.32, issue.2, pp.189-201, 2004.
DOI : 10.1023/b:abme.0000012739.88554.01

L. Billmann and R. Isermann, Leak detection methods for pipelines, Automatica, vol.23, issue.3, pp.381-385, 1987.
DOI : 10.1016/s1474-6670(17)61238-2

K. H. Bartlett, M. Martinez, and J. Bert, Modeling of Occupant-Generated CO2 Dynamics in Naturally Ventilated Classrooms, J. Occup. Environ. Hyg, vol.1, issue.3, pp.139-148, 2004.

Y. Zhu, B. Chen, M. Qin, and Q. A. Huang, 2-D Micromachined Thermal Wind Sensors #x2014;A Review, IEEE Internet Things J, vol.1, issue.3, pp.216-232, 2014.
DOI : 10.1109/jiot.2014.2319296

G. Shen, M. Qin, Q. Huang, H. Zhang, and J. Wu, A FCOB packaged thermal wind sensor with compensation, Microsyst. Technol, vol.16, issue.4, pp.511-518, 2010.
DOI : 10.1007/s00542-010-1026-8

N. T. Nguyen, Micromachined flow sensors-a review, Flow Meas. Instrum, vol.8, issue.1, pp.7-16, 1997.
DOI : 10.1016/s0955-5986(97)00019-8

J. T. Kuo, L. Yu, and E. Meng, Micromachined Thermal Flow Sensors-A Review, vol.3, pp.550-573, 2012.
DOI : 10.3390/mi3030550
URL : http://www.mdpi.com/2072-666X/3/3/550/pdf

R. Vilares, Fabrication and testing of a SU-8 thermal flow sensor, Sens. Actuators B Chem, vol.147, issue.2, pp.411-417, 2010.
DOI : 10.1016/j.snb.2010.03.054

W. Lin and M. A. Burns, Low-power micro-fabricated liquid flow-rate sensor, Anal. Methods, vol.7, issue.9, pp.3981-3987, 2015.
DOI : 10.1039/c5ay00517e

F. Mailly, Anemometer with hot platinum thin film, Sens. Actuators Phys, vol.94, issue.1-2, pp.32-38, 2001.
DOI : 10.1016/s0924-4247(01)00668-9
URL : https://hal.archives-ouvertes.fr/hal-00323760

J. Van-honschoten, J. Van-baar, H. E. De-bree, T. Lammerink, G. Krijnen et al., Application of a microflown as a low-cost level sensor, J. Micromechanics Microengineering, vol.10, issue.2, p.250, 2000.

D. Dittmann, R. Ahrens, Z. Rummler, K. Schlote-holubek, and W. K. Schomburg, Low-Cost Flow Transducer Fabricated with the Amanda-Process, Transducers '01 Eurosensors XV, pp.1444-1447, 2001.
DOI : 10.1007/978-3-642-59497-7_341

K. G. Kreider and F. Dimeo, Platinum/palladium thin-film thermocouples for temperature measurements on silicon wafers, Sens. Actuators Phys, vol.69, issue.1, pp.46-52, 1998.
DOI : 10.1016/s0924-4247(97)01747-0

R. Ma, D. Wang, T. Hsueh, and C. Lee, A MEMS-Based Flow Rate and Flow Direction Sensing Platform with Integrated Temperature Compensation Scheme, Sensors, vol.9, issue.7, pp.5460-5476, 2009.
DOI : 10.3390/s90705460
URL : http://www.mdpi.com/1424-8220/9/7/5460/pdf

M. Zanini, Fabrication and properties of a Si-based high-sensitivity microcalorimetric gas sensor, Sens. Actuators Phys, vol.48, issue.3, pp.187-192, 1995.
DOI : 10.1016/0924-4247(95)01000-9

R. Viard, A robust thermal microstructure for mass flow rate measurement in steady and unsteady flows, J. Micromechanics Microengineering, vol.23, issue.6, p.65016, 2013.
URL : https://hal.archives-ouvertes.fr/hal-00821233

A. Götz, A micromachined solid state integrated gas sensor for the detection of aromatic hydrocarbons, Sens. Actuators B Chem, vol.44, issue.1, pp.483-487, 1997.

P. Norlin, O. Öhman, B. Ekström, and L. Forssén, A chemical micro analysis system for the measurement of pressure, flow rate, temperature, conductivity, UV-absorption and fluorescence, Sens. Actuators B Chem, vol.49, issue.1, pp.34-39, 1998.

T. S. Lammerink, N. R. Tas, M. Elwenspoek, and J. H. Fluitman, Micro-liquid flow sensor, Sens. Actuators Phys, vol.37, pp.45-50, 1993.