Measuring ion velocity distribution functions through high-aspect ratio holes in inductively coupled plasmas

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G. Cunge, Maxime Darnon, J Dubois, P. Bézard, O Mourey, et al.. Measuring ion velocity distribution functions through high-aspect ratio holes in inductively coupled plasmas. Applied Physics Letters, American Institute of Physics, 2016, 108, pp.93109 - 32108. ⟨10.1063/1.4942892⟩. ⟨hal-01865123⟩

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