Measuring ion velocity distribution functions through high-aspect ratio holes in inductively coupled plasmas

G. Cunge (1) , Maxime Darnon (1) , J Dubois (1) , P. Bézard (1) , O Mourey (1) , C. Petit-Etienne (1) , L. Vallier (1) , E. Despiau-Pujo (1) , N. Sadeghi (1)

1 LTM - Laboratoire des technologies de la microélectronique

Domaines: Plasmas

G. Cunge, Maxime Darnon, J Dubois, P. Bézard, O Mourey, et al.. Measuring ion velocity distribution functions through high-aspect ratio holes in inductively coupled plasmas. Applied Physics Letters, 2016, 108, pp.93109 - 32108. ⟨10.1063/1.4942892⟩. ⟨hal-01865123⟩