Sub-µm air-gap resonant MEMS mass sensors fabrication and electrical characterization for the detection of airborne particles

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https://hal.archives-ouvertes.fr/hal-01841627
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Submitted on : Tuesday, July 17, 2018 - 2:13:45 PM
Last modification on : Tuesday, January 15, 2019 - 2:54:11 PM

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Ugur Soysal, Frédéric Marty, Emmanuelle Algre, Evelyne Gehin, Charles Motzkus. Sub-µm air-gap resonant MEMS mass sensors fabrication and electrical characterization for the detection of airborne particles. 2018 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), May 2018, ROMA, France. ⟨10.1109/DTIP.2018.8394231⟩. ⟨hal-01841627⟩

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