Design and Simulation of Bistable Microsystem with Frequency-up conversion effect for Electrostatic Energy Harvesting

Bogdan Vysotsky (1) , Fabien Parrain (2) , Elie Lefeuvre (2) , Xavier Leroux (2) , D. Aubry (3) , Philippe Gaucher

1 IMEC - IMEC
2 C2N - Centre de Nanosciences et de Nanotechnologies
3 LMPS - Laboratoire de Mécanique Paris-Saclay

This work is dedicated for the study of energy harvesters implemented in form of microelectromechanical systems (MEMS) used to harvest ambient vibrations for powering standalone electronic devices. The previewed application is to power a leadless pacemaker with mechanical energy of the heartbeat, which requires the amount of power typically more than 1μW. The target of the presented article is to combine the effect of bistability and non-linear coupling by electrostatic effect in order to achieve the high value of bandwidth at the low frequency under the low accelerations. Such system is expected to bring high power density performance. This study is performed mostly by numerical simulation.

Domaines: Sciences de l'ingénieur [physics]

Bogdan Vysotsky, Fabien Parrain, Elie Lefeuvre, Xavier Leroux, D. Aubry, et al.. Design and Simulation of Bistable Microsystem with Frequency-up conversion effect for Electrostatic Energy Harvesting. Journal of Physics: Conference Series, 2016, 757, pp.12007. ⟨10.1088/1742-6596/757/1/012007⟩. ⟨hal-01832552⟩