Contactless four-terminal MEMS Variable Capacitor for Capacitive Adiabatic Logic

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https://hal.archives-ouvertes.fr/hal-01826227
Contributor : Philippe Basset <>
Submitted on : Friday, June 29, 2018 - 10:50:31 AM
Last modification on : Monday, February 25, 2019 - 4:34:21 PM

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Ayrat Galisultanov, Yann Perrin, Hatem Samaali, Hervé Fanet, Philippe Basset, et al.. Contactless four-terminal MEMS Variable Capacitor for Capacitive Adiabatic Logic. Smart Materials and Structures, IOP Publishing, In press, ⟨10.1088/1361-665X/aacac4⟩. ⟨hal-01826227⟩

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