Electron CHanneling ORientation Determination (eCHORD): An original approach to crystalline orientation mapping

C. Lafond (1) , Thierry Douillard (1, 2) , Sophie Cazottes (1) , Philippe Steyer (1) , Cyril Langlois (1)

1 MATEIS - Matériaux, ingénierie et science [Villeurbanne]
2 CLYM - Consortium Lyon Saint-Etienne de Microscopie

We present a proof-of-concept attesting the feasability to obtain orientation maps of polycrystalline materials within a conventional Scanning Electron Microscope (SEM) using a standard goniometer and Back Scattered Electron (BSE) detector. The described method is based on the analysis of the contrast variation of grains due to the channeling of incident electrons on a rotating sample. On each pixel of the map, experimental intensity profiles as a function of the rotation angle are obtained and compared with simulated ones to retrieve the orientation. From first results on aluminum polycrystals, the angular resolution is estimated to be better than one degree.

Mots clés: EBSD; Orientation mapping; SEM; Electron channeling

Domaines: Matériaux

C. Lafond, Thierry Douillard, Sophie Cazottes, Philippe Steyer, Cyril Langlois. Electron CHanneling ORientation Determination (eCHORD): An original approach to crystalline orientation mapping. Ultramicroscopy, 2018, 186, pp.146-149. ⟨10.1016/j.ultramic.2017.12.019⟩. ⟨hal-01814039⟩