Investigation of hafnium-aluminate alloys in view of integration as interpoly dielectrics of future Flash memories

G. Molas (1) , Marc Bocquet (1) , J. Buckley (1) , H. Grampeix (1) , M. Gely (1) , J.-P. Colonna (1) , C. Licitra (1) , N. Rochat (1) , T. Veyron (1) , X. Garros (1)

1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information

Domaines: Micro et nanotechnologies/Microélectronique

G. Molas, Marc Bocquet, J. Buckley, H. Grampeix, M. Gely, et al.. Investigation of hafnium-aluminate alloys in view of integration as interpoly dielectrics of future Flash memories. Solid-State Electronics, 2007, 51 (11-12), pp.1540 - 1546. ⟨10.1016/j.sse.2007.09.020⟩. ⟨hal-01804685⟩