Depth profiling of noble gas atoms implanted in Al matrix: A photoelectron energy loss spectroscopy study

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Christian Godet, Victor Santana, Denis G.F. David. Depth profiling of noble gas atoms implanted in Al matrix: A photoelectron energy loss spectroscopy study. Thin Solid Films, Elsevier, 2018, 659, pp.70 - 80. ⟨10.1016/j.tsf.2018.05.038⟩. ⟨hal-01803578⟩

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