L-shaped fiber-chip grating couplers with high- directionality and low reflectivity fabricated with deep-UV lithography

Daniel Benedikovic (1) , Carlos Alonso-Ramos (1) , Diego Pérez-Galacho (1) , Sylvain Guerber , Vladyslav Vakarin (1) , Guillaume Marcaud (1) , Xavier Le Roux (2) , Eric Cassan (2) , Delphine Marris-Morini (2) , Pavel Cheben (3) , Frederic Boeuf (4) , Charles Baudot (5) , Laurent Vivien (2)

1 C2N - Centre de Nanosciences et de Nanotechnologies [Orsay]
2 IEF - Institut d'électronique fondamentale
3 NRC - National Research Council of Canada
4 ST-CROLLES - STMicroelectronics [Crolles]
5 STMicroelectronics

Mots clés: OCIS codes: (0500050) Diffraction and gratings; (1300130) Integrated optics; (0506624) Subwavelength structures; (0501950) Diffraction gratings

Domaines: Micro et nanotechnologies/Microélectronique; Optique / photonique

Daniel Benedikovic, Carlos Alonso-Ramos, Diego Pérez-Galacho, Sylvain Guerber, Vladyslav Vakarin, et al.. L-shaped fiber-chip grating couplers with high- directionality and low reflectivity fabricated with deep-UV lithography. Optics Letters, 2017, Vol. 42 (Issue 17), pp. 3439-3442. ⟨10.1364/OL.42.003439⟩. ⟨hal-01800599⟩