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Low-loss grating-coupled optical interfaces for large-volume fabrication with deep-ultraviolet optical lithography

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https://hal.archives-ouvertes.fr/hal-01800594
Contributor : Daniel Benedikovic <>
Submitted on : Tuesday, September 18, 2018 - 3:58:31 PM
Last modification on : Monday, December 7, 2020 - 10:02:39 AM
Long-term archiving on: : Wednesday, December 19, 2018 - 12:31:25 PM

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Daniel Benedikovic, Carlos Alberto Alonso-Ramos, Sylvain Guerber, Diego Pérez-Galacho, Vladyslav Vakarin, et al.. Low-loss grating-coupled optical interfaces for large-volume fabrication with deep-ultraviolet optical lithography. SPIE Photonics Europe, Apr 2018, Strasbourg, France. ⟨hal-01800594⟩

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