Spectroscopic ellipsometry of columnar porous Si thin films and Si nanowires

Bálint Fodor (1, 2) , Thomas Defforge (1) , Emil Agócs (2) , Miklós Fried (2) , Gaël Gautier (1) , Péter Petrik (2)

1 GREMAN - UMR 7347 - GREMAN (matériaux, microélectronique, acoustique et nanotechnologies)
2 MFA - Research Institute for Technical Physics and Materials Science

Domaines: Matériaux; Matériaux; Micro et nanotechnologies/Microélectronique

Bálint Fodor, Thomas Defforge, Emil Agócs, Miklós Fried, Gaël Gautier, et al.. Spectroscopic ellipsometry of columnar porous Si thin films and Si nanowires. Applied Surface Science, 2017, 421, pp.397 - 404. ⟨10.1016/j.apsusc.2016.12.063⟩. ⟨hal-01792014⟩