Microwave PACVD of low friction a-SiC coatings : from plasma characterization to material mechanical property

Document type :
Conference papers
Complete list of metadatas

https://hal.archives-ouvertes.fr/hal-01788438
Contributor : Imt Mines Albi Ecole Nationale Supérieure Des Mines d'Albi-Carmaux <>
Submitted on : Wednesday, May 9, 2018 - 9:45:13 AM
Last modification on : Thursday, October 25, 2018 - 10:10:02 AM

Identifiers

  • HAL Id : hal-01788438, version 1

Collections

Citation

Laurent Thomas, Francis Teyssandier, Michel Ducarroir, Christine Boher, Laurent Autrique, et al.. Microwave PACVD of low friction a-SiC coatings : from plasma characterization to material mechanical property. Chemical Vapor Deposition XVI and EUROCVD 14, Apr 2003, Paris, France. p.359-364. ⟨hal-01788438⟩

Share

Metrics

Record views

55