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Article Dans Une Revue Scripta Materialia Année : 2018

Atom probe tomography for advanced nanoelectronic devices: Current status and perspectives

J. Bogdanowicz
  • Fonction : Auteur
C. Fleischmann
  • Fonction : Auteur
D. Melkonyan
  • Fonction : Auteur
W. Vandervorst
  • Fonction : Auteur
Sébastien Duguay
Nicolas Rolland
  • Fonction : Auteur
  • PersonId : 758402
  • IdRef : 17720544X
François Vurpillot
D. Blavette

Résumé

Atom probe tomography is unique in its ability to image in 3D at the atomic scale and measure composition in asemiconductor device with high sensitivity. However it suffers from many artefacts. The current state of the art ofnanoelectronic device analysis by atom probe is addressed and the challenges in device analysis in the next tenyears are laid out. Finally the improvements necessary in sample preparation, instrumentation and reconstructionprocedures are discussed
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Dates et versions

hal-01765929 , version 1 (13-04-2018)

Identifiants

Citer

J. Barnes, A. Grenier, I. Mouton, S. Barraud, G. Audoit, et al.. Atom probe tomography for advanced nanoelectronic devices: Current status and perspectives. Scripta Materialia, 2018, 148, pp.91 - 97. ⟨10.1016/j.scriptamat.2017.05.012⟩. ⟨hal-01765929⟩
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