Atom probe tomography analysis of SiGe fins embedded in SiO$_2$ : Facts and artefacts

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https://hal.archives-ouvertes.fr/hal-01765926
Contributor : Etienne Talbot <>
Submitted on : Friday, April 13, 2018 - 11:12:35 AM
Last modification on : Thursday, May 16, 2019 - 1:18:03 PM

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D. Melkonyan, C. Fleischmann, L. Arnoldi, J. Demeulemeester, A. Kumar, et al.. Atom probe tomography analysis of SiGe fins embedded in SiO$_2$ : Facts and artefacts. Ultramicroscopy, Elsevier, 2017, 179, pp.100 - 107. ⟨10.1016/j.ultramic.2017.04.006⟩. ⟨hal-01765926⟩

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