Low temperature capacitive micromachined ultrasonic transducers (cMUTs) on glass substrate

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https://hal.archives-ouvertes.fr/hal-01741067
Contributor : Jean-Francois Michaud <>
Submitted on : Thursday, March 22, 2018 - 4:15:04 PM
Last modification on : Wednesday, December 12, 2018 - 3:27:46 PM

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Emilie Bahette, Jean-François Michaud, Dominique Certon, Dominique Gross, Marie Perroteau, et al.. Low temperature capacitive micromachined ultrasonic transducers (cMUTs) on glass substrate. Journal of Micromechanics and Microengineering, IOP Publishing, 2016, 26 (11), ⟨10.1088/0960-1317/26/11/115023⟩. ⟨hal-01741067⟩

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