Solid phase epitaxy - Activation and deactivation of boron in ultra-shallow junctions

W. Lerch , S. Paul , J. Niess , Fuccio Cristiano (1) , Y. Lamrani (1) , P. Calvo (1) , Nikolay Cherkashin (1) , D.F. Downey , E.A. Arevalo

1 CEMES - Centre d'élaboration de matériaux et d'études structurales

Domaines: Physique [physics]

W. Lerch, S. Paul, J. Niess, Fuccio Cristiano, Y. Lamrani, et al.. Solid phase epitaxy - Activation and deactivation of boron in ultra-shallow junctions. Advanced short-time thermal processing for Si-based CMOS devices , 2004, indéterminée, Unknown Region. pp.90-105. ⟨hal-01736100⟩