Nano-probing station incorporating MEMS probes for 1D device RF on-wafer characterization

K. Daffe (1) , J. Marzouk (1) , A. El El Fellahi (1) , T. Xu (1) , Christophe Boyaval (1) , S. Eliet (1) , B. Grandidier (1, 2) , S. Arscott (1, 3) , Gilles Dambrine (1) , Kamel Haddadi (1)

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
2 PHYSIQUE - IEMN - Physique - IEMN
3 NAM6 - IEMN - Nano and Microsystems - IEMN

—A microwave nano-probing station incorporating home-made MEMS coplanar waveguide (CPW) probes was built inside a scanning electron microscope. The instrumentation proposed is able to measure accurately the guided complex reflection of 1D devices embedded in dedicated CPW micro-structures. As a demonstration, RF impedance characterization of an Indium Arsenide nanowire is exemplary shown up to 6 GHz. Next, optimization of the MEMS probe assembly is experimentally verified by establishing the measurement uncertainty up to 18 GHz.

Domaines: Sciences de l'ingénieur [physics]; Micro et nanotechnologies/Microélectronique; Electromagnétisme

K. Daffe, J. Marzouk, A. El El Fellahi, T. Xu, Christophe Boyaval, et al.. Nano-probing station incorporating MEMS probes for 1D device RF on-wafer characterization. 2017 47th European Microwave Conference (EuMC), Oct 2017, Nuremberg, Germany. ⟨10.23919/EuMC.2017.8230973⟩. ⟨hal-01726555⟩