Optimising electron microscopy experiment through electron optics simulation

Y Kubo 1 Christophe Gatel 2 Etienne Snoeck 2 Florent Houdellier 2
1 QUANTRONICS - Quantronics Group
SPEC - UMR3680 - Service de physique de l'état condensé, IRAMIS - Institut Rayonnement Matière de Saclay
2 CEMES-I3EM - Interférométrie, In situ et Instrumentation pour la Microscopie Electronique
CEMES - Centre d'élaboration de matériaux et d'études structurales
Abstract : We developed a new type of electron trajectories simulation inside a complete model of a modern transmission electron microscope (TEM). Our model incorporates the precise and real design of each element constituting a TEM, i.e. the field emission (FE) cathode, the extraction optic and acceleration stages of a 300 kV cold field emission gun, the illumination lenses, the objective lens, the intermediate and projection lenses. Full trajectories can be computed using magnetically saturated or non-saturated round lenses, magnetic deflectors and even non-cylindrical symmetry elements like electrostatic biprism. This multi-scale model gathers nanometer size components (FE tip) with parts of meter length (illumination and projection systems). We demonstrate that non-trivial TEM experiments requiring specific and complex optical configurations can be simulated and optimized prior to any experiment using such model. We show that all the currents set in all optical elements of the simulated column can be implemented in the real column (I2TEM in CEMES) and used as starting alignment for the requested experiment. We argue that the combination of such complete electron trajectory simulations in the whole TEM column with automatic optimization of the microscope parameters for optimal experimental data (images, diffraction, spectra) allows drastically simplifying the implementation of complex experiments in TEM and will facilitate the development of advanced use of the electron microscope in the near future.
Type de document :
Article dans une revue
Ultramicroscopy, Elsevier, 2017, 175, pp.67--80. 〈10.1016/j.ultramic.2017.01.007〉
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Contributeur : Céline Smith <>
Soumis le : lundi 12 février 2018 - 13:23:02
Dernière modification le : mercredi 18 avril 2018 - 16:36:34

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Y Kubo, Christophe Gatel, Etienne Snoeck, Florent Houdellier. Optimising electron microscopy experiment through electron optics simulation. Ultramicroscopy, Elsevier, 2017, 175, pp.67--80. 〈10.1016/j.ultramic.2017.01.007〉. 〈hal-01706932〉

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