Fabrication and characterization of resonant SOI micromechanical silicon sensors based on DRIE micromachining, freestanding release process and silicon direct bonding

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Contributor : Gilles Amendola <>
Submitted on : Saturday, January 27, 2018 - 9:35:47 AM
Last modification on : Tuesday, January 15, 2019 - 2:54:11 PM

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Olivier Gigan, Hua Chen, Olivier Robert, Gilles Amendola, Olivier Français, et al.. Fabrication and characterization of resonant SOI micromechanical silicon sensors based on DRIE micromachining, freestanding release process and silicon direct bonding. SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, Dec 2002, Melbourne, Australia. ⟨10.1117/12.469740⟩. ⟨hal-01694312⟩

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