Theoretical studies of the spin coating process for the deposition of polymer-based Maxwellian liquids

Pierre Temple-Boyer (1) , Laurent Mazenq (2) , Jean-Baptiste Doucet (2) , Véronique Conédéra (2) , Benoit Torbiero (1) , Jérôme Launay (1)

1 LAAS-MICA - Équipe MICrosystèmes d'Analyse
2 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique

This paper deals with the study of spin coating processes for the deposition of polysiloxane-based thin films. Specific developments are proposed in order to adapt the hydrodynamic laws theory to the spin coating of Maxwellian liquids. Theoretical and experimental results are compared, evidencing a good fit and enabling to define the Maxwellian law for the studied polysiloxane polymer. Finally, the theoretical developments are successfully extended to the BCB 4026 and SU-8 3050 photosensitive resins.

Mots clés: SU-8 resin 2; Maxwellian liquids; spin coating; polysiloxane; BCB resin

Domaines: Génie des procédés; Micro et nanotechnologies/Microélectronique

Pierre Temple-Boyer, Laurent Mazenq, Jean-Baptiste Doucet, Véronique Conédéra, Benoit Torbiero, et al.. Theoretical studies of the spin coating process for the deposition of polymer-based Maxwellian liquids. Microelectronic Engineering, 2010, 87 (2), pp.163-166. ⟨10.1016/j.mee.2009.06.030⟩. ⟨hal-01687852⟩