Analysis of signals propagating in a phononic crystal PZT layer deposited on a silicon substrate

Abstract : The design of a stop-band filter constituted by a periodically patterned lead zirconate titanate (PZT) layer, polarized along its thickness, deposited on a silicon substrate and sandwiched between interdigitated electrodes for emission/reception of guided elastic waves, is investigated. The filter characteristics are theoretically evaluated by using finite element simulations: dispersion curves of a patterned PZT layer with a specific pattern geometry deposited on a silicon substrate present an absolute stop band. The whole structure is modeled with realistic conditions, including appropriate interdigitated electrodes to propagate a guided mode in the piezoelectric layer. A robust method for signal analysis based on the Gabor transform is applied to treat transmitted signals; extract attenuation, group delays, and wave number variations versus frequency; and identify stop-band filter characteristics.
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Submitted on : Saturday, December 23, 2017 - 12:46:11 PM
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Anne-Christine Hladky-Hennion, Jérôme Vasseur, Bertrand Dubus, Bruno Morvan, Nicolas Wilkie-Chancellier, et al.. Analysis of signals propagating in a phononic crystal PZT layer deposited on a silicon substrate. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, Institute of Electrical and Electronics Engineers, 2013, 60 (12), pp.2607 - 2614. ⟨10.1109/TUFFC.2013.2859⟩. ⟨hal-01672104⟩

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